Precision at
13.5 Nanometers
Independent EUV metrology services for the semiconductor industry. We test at the actual wavelength so your components perform exactly as designed.
The Industry Has
a Testing Problem
As EUV lithography becomes the backbone of advanced chipmaking, every material and component must be validated under real 13.5nm light. But access to that light is nearly impossible.
Almost Zero Access Globally
There are very few facilities worldwide that can test under real EUV light, and the ones that exist are either government-run, overbooked, or closed to commercial customers.
$370M Machines, Untested Parts
High-NA EUV scanners are the most expensive machines ever made. Every component going near them must be EUV-qualified, but testing access doesn’t exist.
3-6 Month Wait Times
National labs operate on academic timelines. Companies in the EUV supply chain need results in days, not months.
Metrology as
a Service
Actinic Labs provides commercial-grade EUV testing with the speed, confidentiality, and flexibility the semiconductor industry demands.
Real EUV Light
Built around the Energetiq EQ-10, a pulsed DPP source delivering up to 20W of in-band EUV at 13.5nm. Industry-relevant conditions, not synchrotron approximations.
Fast Turnaround
Standard results in 2-4 weeks. Rush service available. That’s 10x faster than national labs and government research facilities.
Full Confidentiality
Your NDA. Your data. Period. No FOIA risk, no shared consortium data, no public disclosure. Complete IP protection for every engagement.
Pay Per Test
No membership fees. No consortium buy-in. Commercial flexibility that lets companies of any size access EUV testing on demand.
Built for the
EUV Ecosystem
Scanner & Tool OEMs
Component qualification, sensor calibration, and material testing for next-gen lithography platforms.
Material Suppliers
EUV compatibility testing for adhesives, lubricants, coatings, and specialty materials entering the supply chain.
Fabs & IDMs
Resist evaluation, mask-related metrology, and process characterization under real actinic conditions.
Research Institutions
Fast-track access to EUV light for academic and government research programs without synchrotron wait times.
Let’s Shape the Future of
EUV Metrology
Whether you’re exploring partnerships, investment opportunities, or need precision metrology for your next-gen program.