EUV Metrology
Service Portfolio
Comprehensive testing and characterization services under real 13.5nm EUV conditions. Every service built for the speed and confidentiality the semiconductor industry demands.
Detector & Sensor Calibration
EUV Responsivity Calibration
Absolute responsivity measurements at 13.5nm using NIST-traceable standards. Essential for detector manufacturers and tool OEMs qualifying sensors for scanner integration.
Spectral Response Mapping
Full spectral characterization across the EUV and soft X-ray range. Identifies out-of-band sensitivity and validates filter stack performance.
Linearity & Dynamic Range Testing
Verifies sensor linearity across operational power ranges. Critical for dose control and energy monitoring in production scanners.
Spatial Uniformity Characterization
Maps detector active area response uniformity. Ensures consistent performance across the full sensing surface.
Filter & Optics Characterization
EUV Transmittance Measurement
Precise transmission measurements of spectral purity filters, pellicles, and thin-film optical elements at 13.5nm.
Out-of-Band Rejection Testing
Quantifies filter performance at blocking DUV, visible, and IR radiation. Validates spectral purity for dose-critical applications.
Reflectance Characterization
EUV reflectance measurements for multilayer mirrors, mask blanks, and coated substrates at operational angles of incidence.
Degradation & Lifetime Testing
Accelerated EUV exposure testing to evaluate optical component durability and predict operational lifetime under production conditions.
Material Compatibility Testing
Outgassing Analysis (RGA)
Residual gas analysis under EUV exposure to identify contaminant species released by adhesives, lubricants, coatings, and structural materials. Critical for SEMI P44 compliance.
EUV-Induced Contamination Testing
Evaluates material propensity to generate carbon growth or oxidation on nearby optical surfaces when exposed to EUV radiation.
Surface Chemistry Analysis
Pre- and post-exposure surface characterization to understand how EUV irradiation modifies material properties and chemical composition.
Qualification Certification
Comprehensive test reports suitable for supplier qualification packages. Provides the documentation your customers need to approve materials for EUV environments.
Resist & Process Characterization
EUV Resist Sensitivity Testing
Dose-to-clear and contrast curve measurements under real EUV illumination. Validates resist performance without relying on synchrotron approximations.
Photon Shot Noise Evaluation
Stochastic exposure studies to characterize resist behavior at dose levels relevant to High-NA EUV production.
Secondary Electron Yield Measurement
Quantifies secondary electron emission from surfaces and resist films under EUV exposure. Supports resist chemistry development and process modeling.
Custom & Specialized Measurements
Custom Test Development
Have a measurement that doesn’t fit the standard menu? We design custom test protocols for unique requirements. Bring us the question, we’ll build the experiment.
Consulting & Advisory
Expert guidance on EUV material selection, component qualification strategies, and metrology best practices. Leverage our domain expertise before, during, or after testing.
Simple. Fast.
Confidential.
Define Requirements
Tell us what you need measured. We’ll work with you to define the test protocol, acceptance criteria, and deliverables.
Ship Your Samples
Send us your materials, components, or devices. We handle everything from receiving through secure chain-of-custody tracking.
We Test
Your samples go under real 13.5nm EUV light in our controlled lab environment. All testing performed under NDA with full data confidentiality.
Get Your Report
Comprehensive test report with raw data, analysis, and certification documentation. Standard turnaround: 2-4 weeks. Rush available.
Need EUV Metrology
Services?
Tell us about your testing needs and we’ll put together a custom proposal within 48 hours.